JPH0397855U - - Google Patents

Info

Publication number
JPH0397855U
JPH0397855U JP685090U JP685090U JPH0397855U JP H0397855 U JPH0397855 U JP H0397855U JP 685090 U JP685090 U JP 685090U JP 685090 U JP685090 U JP 685090U JP H0397855 U JPH0397855 U JP H0397855U
Authority
JP
Japan
Prior art keywords
substrate holder
ion
substrate
metal
irradiation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP685090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP685090U priority Critical patent/JPH0397855U/ja
Publication of JPH0397855U publication Critical patent/JPH0397855U/ja
Pending legal-status Critical Current

Links

JP685090U 1990-01-26 1990-01-26 Pending JPH0397855U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP685090U JPH0397855U (en]) 1990-01-26 1990-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP685090U JPH0397855U (en]) 1990-01-26 1990-01-26

Publications (1)

Publication Number Publication Date
JPH0397855U true JPH0397855U (en]) 1991-10-09

Family

ID=31510522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP685090U Pending JPH0397855U (en]) 1990-01-26 1990-01-26

Country Status (1)

Country Link
JP (1) JPH0397855U (en])

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